Fiber coupled integrated terahertz spectrometer, nanoscanner and 3D imager

Fiber coupled integrated terahertz spectrometer, nanoscanner and 3D imager

Fiber coupled desktop system

Layer by layer spectra
Evolution of terahertz time-domain signal at increasing depth

Lattice imaging stacking faultTop layer thickness is 18 nm
Left: 3D image of epitaxial SiGe layer on top of the Ge lattice structure grown on Si wafer. Right: Thickness of the top layer is ~18 nm.

Layer thickness Layer thickness measurement
Left: 3D image of epitaxial Ge lattice structure grown on Si wafer. Right: Thickness of the Ge layer is ~600 nm.